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SPR
The SPR Series Subatmospheric Pressure Regulator is designed for the introduction of a low vapor pressure reactive or purge gas into a subatmospheric process.
The large diameter diaphragm provides optimum sensitivity for subatmospheric or positive pressure control.
Standard features allow service in many varied applications including corrosive fl uids and, with the optional features available, the user can tailor this regulator to applications ranging from semiconductor processing to analytical instrumentation.
- Subatmospheric or positive pressure control
- 20 micron inlet filter
- 316L stainless steel or INCONEL® construction
- Large stainless steel diaphragm with PTFE lining for optimal pressure control
- Cv flow coefficient of 0.2
- Bubble-tight shutoff
- Inlet/outlet connections 1⁄4˝ FNPT
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| Construction | 316L stainless steel or INCONEL® construction |
| Outlet Pressure | Adjustable outlet pressure range of 1–30 psia (27.88 in. H2O = 15.3 psig) |
| Inlet Pressure | 15–160 psia (0–145 psig) |
| Operating Temperatures | -40° F to +250° F (-40°C to +121° C) |
Support Materials
Flow Formulas